3:15 PM - 3:30 PM
[20p-H101-8] Electron-spin-resonance study on nitrided MOS interfaces of epitaxial 4H-SiC substrates
〇Takahide Umeda1, Yohei Kagoyama1, Takafumi Okuda2, Jun Suda2, Tsunemasa Kimoto2, Ryoji Kosugi3, Mitsuo Okamoto3, Shinsuke Harada3 (1.Univ. of Tsukuba, 2.Kyoto Univ., 3.AIST)