Yukinori Morita

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:45 PM - 6:00 PM

[19p-S423-16] Etching of Ge Channel Surfaces by Oxygen Molecules

〇Yukinori Morita¹, Tatsuro Maeda¹, Hiroyuki Ota¹, Wataru Mizubayashi¹, Shn-ichi O'uchi¹, Meishoku Masahara¹, Takashi Matsukawa¹, Kazuhiko Endo¹ (1.AIST)

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