Kenji Inaba

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

6:00 PM - 6:15 PM

[19p-S423-17] Development of Ultra Accelerated Quantum Chemical Molecular Dynamics Method and Its Application to Semiconductor Process

〇Kenji Inaba¹, Emi Sato¹, Manami Sato¹, Yukiko Obara¹, Yukie Ishizawa¹, Masayuki Miyano¹, Ryuji Miura¹, Patrick Bonnaud¹, Ai Suzuki¹, Naoto Miyamoto¹, Nozomu Hatakeyama¹, Masanori Hariyama¹, Akira Miyamoto¹ (1.Tohoku Univ.)

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