Shunsuke Oba

→ Search for Shunsuke Oba in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

3:15 PM - 3:30 PM

[19p-S423-7] Precise Control of the Nickelidation Process of Si Nanowire by Ar⁺Ion Irradiation

〇(B)Shunsuke Oba¹, Shuichiro Hashimoto¹, Kohei Takei¹, Jing Sun¹, Xu Zhang¹, Taiyu Xu¹, Shuhei Asada¹, Toshihiro Usuda¹, Kiyoshi Endo¹, Motohiro Tomita^1,2,3, Hiroki Tokutake³, Ryosuke Imai³, Atsushi Ogura³, Takashi Matsukawa⁴, Meishoku Masahara⁴, Takanobu Watanabe¹ (1.Waseda Univ., 2.JSPS PD, 3.Meiji Univ., 4.AIST)