Mengyi Chen

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Speaker, Author, Co-Author

Sat. Mar 19, 2016 1:45 PM - 6:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19p-S423-1~17] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

3:30 PM - 3:45 PM

[19p-S423-8] Effect of HfN capping layer for PtHfSi formation

〇(M2)Mengyi Chen¹, Yasushi Masahiro², Shun-ichiro Ohmi¹ (1.Tokyo Tech, 2.Tanaka Kikinzoku)