Kentaro Nishida

→ Search for Kentaro Nishida in Google Scholar

Speaker, Author, Co-Author

Sat. Mar 19, 2016 2:30 PM - 5:45 PM W621 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[19p-W621-1~12] 8.4 Plasma etching

3:15 PM - 3:30 PM

[19p-W621-4] An electrical evaluation technique for plasma-induced interlayer dielectric damage

〇(M1)Kentaro Nishida¹, Yukimasa Okada¹, Yoshinori Takao², Koji Eriguchi¹, Kouichi Ono¹ (1.Kyoto Univ., 2.Yokohama National Univ.)