Daiki Mamezaki

→ Search for Daiki Mamezaki in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:30 AM - 12:00 PM S224 (S2)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[20a-S224-1~9] 7.3 Micro/Nano patterning and fabrication

9:30 AM - 9:45 AM

△ [20a-S224-1] Development of a transmittance measurement method for EUV resist using a photodiode

〇Daiki Mamezaki¹, Masanori Watanabe¹, Haruki Iguchi¹, Tetsuo Harada¹, Takeo Watanabe¹ (1.University of Hyogo)