Takashi Matsukawa

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S422 (S4)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[20a-S422-1~12] 13.5 Semiconductor devices and related technologies

10:15 AM - 10:30 AM

[20a-S422-6] Dependence of GIDL of FinFETs on ion implantation species for extension doping

〇Takashi Matsukawa¹, Shintaro Otsuka¹, Takahiro Mori¹, Yukinori Morita¹, Yongxun Liu¹, Shinichi O'uchi¹, Hirosi Fuketa¹, Shinji Migita¹, Meishoku Masahara¹ (1.AIST)

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