Yoshinobu Kimura

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H101 (H)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[20p-H101-1~21] 15.6 Group IV Compound Semiconductors (SiC)

2:00 PM - 2:15 PM

[20p-H101-4] Observation of Extended Defects in a 4H-SiC Epitaxial Layer with Voltage Contrast Methods

〇Yoshinobu Kimura¹, Natsuki Tsuno¹, Hiroyuki Okino¹, Yuki Mori¹, Toshiyuki Ono¹, Renichi Yamada¹ (1.Hitachi, Ltd. R&D)