Shotaro Tanaka

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:15 PM - 7:00 PM H103 (H)

Oral presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[20p-H103-1~21] 6.2 Carbon-based thin films

4:00 PM - 4:15 PM

△ [20p-H103-11] The film modification of Si-containing hydrogenated DLC films by the soft X-ray irradiation

〇(M1C)Shotaro Tanaka¹, Takayuki Hasagawa^1,2, Makoto Okada¹, Shinji Matsui¹, Kazuhiro Kanda¹ (1.LASTI, Univ. of Hyogo, 2.SALLC)