Takashi Suemasu

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 4:00 PM - 6:00 PM P13 (Gymnasium)

Poster presentation
| 13 Semiconductors
| 13.2 Exploratory Materials, Physical Properties, Devices

[20p-P13-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

4:00 PM - 6:00 PM

[20p-P13-11] Formation of polycrystalline BaSi₂ thin films by RF sputtering

Seiya Yokoyama¹, Masami Mesuda², Taketo Kuramochi², Kaoru Toko¹, 〇Takashi Suemasu¹ (1.Univ. Tsukuba, 2.Tosoh Corp.)