kentaro Tokoro

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:30 PM - 3:30 PM P8 (Gymnasium)

Poster presentation
| 9 Applied Materials Science
| 9.3 Nanoelectronics

[20p-P8-1~6] 9.3 Nanoelectronics

1:30 PM - 3:30 PM

[20p-P8-6] Room-temperature atomic layer deposition of zirconium oxide using plasma exited water vapor.

〇kentaro Tokoro¹, Kensaku Kanomata², Bashir Ahmmad², Shigeru Kubota², Fumihiko Hirise² (1.Yamagata Univ., 2.Yamagata Grad.)