Yutaka Adachi

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20p-S221-1~17] 13.3 Insulator technology

4:00 PM - 4:15 PM

[20p-S221-10] Improvement of moisture resistance of La₂O₃ films by impurity doping

〇Yutaka Adachi¹, Isao Sakaguchi¹ (1.NIMS)