Junichi Shimizu

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:30 PM S422 (S4)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[20p-S422-1~18] 13.5 Semiconductor devices and related technologies

1:45 PM - 2:00 PM

[20p-S422-1] Improving electrical characteristics of sputtered MoS₂ film by post-annealing in forming gas atmosphere

〇Junichi Shimizu¹, Takumi Ohashi¹, Kentaro Matsuura¹, Kuniyuki Kakushima¹, Kazuo Tsutsui¹, Hitoshi Wakabayashi¹ (1.Tokyo Tech)