Masahiro Koyama

→ Search for Masahiro Koyama in Google Scholar

Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

1:45 PM - 2:00 PM

△ [20p-S423-1] Fabrication of single-crystalline LLPE-GeSn layer on quartz substrate by rapid thermal annealing and its MOSFET characteristics

〇Masahiro Koyama¹, Hiroshi Oka¹, Takashi Amamoto¹, Kohei Tominaga¹, Shogo Tanaka¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ.)