YI CHEN

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

4:30 PM - 4:45 PM

[20p-S423-11] An Application of Excimer Laser Annealing in Low-Voltage Power MOSFETs Process

〇YI CHEN¹, Tatsuya Okada¹, Takashi Noguchi¹, Fulvio MAZZAMUTO², Karim HUET² (1.Univ. of the Ryukyus, 2.SCREEN Semiconductor Solutions Co., Ltd)