Hideaki Tanimura

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

5:00 PM - 5:15 PM

[20p-S423-13] High activation in n+/p Ge and formation of shallow junction by Flash Lamp Anneal(FLA)

〇Hideaki Tanimura¹, Hikaru Kawarazaki¹, Yukio Ono¹, Takahiro Yamada¹, Shinichi Kato¹, Takayuki Aoyama¹, Ippei Kobayashi¹ (1.SCREEN Semiconductor Solutions)

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