Hiroki Ikegaya

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

6:00 PM - 6:15 PM

[20p-S423-17] Characterization of defects induced by ion implantation in germanium by DLTS

〇Hiroki Ikegaya¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)