ThiCamTu Huynh

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

6:30 PM - 6:45 PM

▲ [20p-S423-19] Low Temperature Cat-Doping of Phosphorous Atoms into Crystalline Silicon through Ultrathin SiO₂ Layer

〇(P)ThiCamTu Huynh¹, Koichi Koyama¹, Shigeki Terashima¹, Hideki Matsumura¹ (1.JAIST)