Yuya Nishimura

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:15 PM - 2:30 PM

△ [20p-S423-3] Self-Aligned Planar Metal Double Gate Low-Temperature thin Poly-Ge TFTs on a Glass Substrate

〇Yuya Nishimura¹, Takuya Nakashima¹, Makoto Mori¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)