Susumu Horita

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:45 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20p-S423-1~19] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:45 PM - 3:00 PM

[20p-S423-5] Characteristics of SPC Si-TFT fabricated by using YSZ crystallization induction layer and two-step irradiation method of pulsed laser

〇Susumu Horita¹, Lien Mai¹ (1.Jap. Adv. Inst. Sci. & Tech.)