Fumihiko Matsunaga

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 2:00 PM - 5:30 PM W621 (W6)

Symposium
| Symposium
| Gas Flow Analysis in Vacuum and Low-Pressure Processing

[20p-W621-1~7] Gas Flow Analysis in Vacuum and Low-Pressure Processing

4:30 PM - 5:00 PM

[20p-W621-6] Simulation of plasma processing

〇Fumihiko Matsunaga¹ (1.PEGASUS Software)