Shuichi Tajiri

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 2:00 PM - 5:30 PM W621 (W6)

Symposium
| Symposium
| Gas Flow Analysis in Vacuum and Low-Pressure Processing

[20p-W621-1~7] Gas Flow Analysis in Vacuum and Low-Pressure Processing

5:00 PM - 5:30 PM

[20p-W621-7] Pressure distribution and dynamic pressure measurement of sputtering system

〇Shuichi Tajiri¹, Takanori Onishi¹, Yukiko Okano¹, Soichi Ogawa², Hiroshi Mima³ (1.Okano Works,LTD., 2.Ogawa Creation Research Lab., 3.Osaka City Univ.)

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