9:45 AM - 10:00 AM △ [21a-S222-4] Fabrication and Evaluation of Crystal Structure of α-(AlxGa1-x)2O3 Superlattice Buffer Layers 〇Riena Jinno1, Takayuki Uchida1, Kentaro Kaneko1, Shizuo Fujita1 (1.Kyoto Univ.)