Koji Sugioka

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:15 PM W321 (W2・W3)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[21a-W321-1~12] 3.7 Laser processing

9:45 AM - 10:00 AM

[21a-W321-4] Fabricaton of Through Si Vias by 1.5 μm Femtosecond Bessel Beams

Fei He^1,2, Ya Cheng², 〇Koji Sugioka¹ (1.RIKEN, 2.SIOM)