Masahiro Horita

→ Search for Masahiro Horita in Google Scholar

Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:15 PM W541 (W5)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[21a-W541-1~12] 13.8 Compound and power electron devices and process technology

11:00 AM - 11:15 AM

[21a-W541-8] Wafer mapping of deep level trap concentration in homoepitaxial n-type GaN by capacitance transient measurement

〇Masahiro Horita¹, Tetsuo Narita², Tetsu Kachi², Tsutomu Uesugi², Jun Suda¹ (1.Kyoto Univ., 2.Toyota Central R&D Labs.)