Tadahiro Kawasaki

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:15 PM - 7:00 PM H137 (H)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.2 Applications and technologies of electron beams

[21p-H137-1~22] 7.2 Applications and technologies of electron beams

3:15 PM - 3:30 PM

[21p-H137-9] Development of electrostatic Cs-corrector using annular and circular electrodes (ACE corrector)(3)

〇Tadahiro Kawasaki^1,2, Yasuyuki Takai³, Yuki Ogawa³, Takafumi Ishida², Tetsuji Kodama³, Masahiro Tomita⁴, Takaomi Matsutani⁵, Takashi Ikuta⁶ (1.JFCC, 2.IMaSS, Nagoya Univ., 3.Meijo Univ., 4.Vacuum Device Inc., 5.Kinki Univ., 6.OECU)

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