[21p-H137-1~22] 7.2 Applications and technologies of electron beams

[21p-H137-9] Development of electrostatic Cs-corrector using annular and circular electrodes (ACE corrector)(3)

〇Tadahiro Kawasaki^1,2, Yasuyuki Takai³, Yuki Ogawa³, Takafumi Ishida², Tetsuji Kodama³, Masahiro Tomita⁴, Takaomi Matsutani⁵, Takashi Ikuta⁶ (1.JFCC, 2.IMaSS, Nagoya Univ., 3.Meijo Univ., 4.Vacuum Device Inc., 5.Kinki Univ., 6.OECU)

Keywords:Cs corrector,Electron microscope,Chromatic aberration

The spherical-aberration-corrector for high-resolution electron microscopes has been newly designed and constructed. This aberration correction device is formed by an electrostatic lens consisted of only two electrodes having annular and circular holes and a constant-voltage supply. We call it “ACE (Annular and Circular Electrodes) corrector”. The ACE corrector has big advantages in easy alignment and very low-cost over the conventional Cs-correctors. In this study, we have investigated behaviors of the spherical and chromatic aberrations in the proposed device by numerical calculations.