Toshihide Nabatame

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:30 PM - 6:15 PM S222 (S2)

Symposium
| Symposium
| Advanced Fabrication System for Metal Oixde Thin Films

[21p-S222-1~9] Advanced Fabrication System for Metal Oixde Thin Films

5:15 PM - 5:45 PM

[21p-S222-8] Electronic device applications of metal oxide thin films by atomic layer deposition method

〇Toshihide Nabatame¹ (1.NIMS)