Mikito Nozaki

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 1:45 PM - 5:00 PM W541 (W5)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[21p-W541-1~12] 13.8 Compound and power electron devices and process technology

2:00 PM - 2:15 PM

[21p-W541-2] TEM observation of interface between sputter-deposited Al-based insulator and AlGaN

〇Mikito Nozaki¹, Ryohei Asahara¹, Joyo Ito¹, Kenta Watanabe¹, Takahiro Yamada¹, Satoshi Nakazawa², Yoshiharu Anda², Masahiro Ishida², Tetsuzo Ueda², Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ., 2.Panasonic)

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