Hirotsugu Sugiura

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Speaker, Author, Co-Author

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Oral presentation
| 8 Plasma Electronics
| 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

10:15 AM - 10:30 AM

△ [22a-W611-6] Dependence of CCP power on Near-Edge X-Ray Absorption Fine Structure of Amorphous Carbon Films Grown by Plasma-Enhanced Chemical Vapor Deposition

〇(M2)Hirotsugu Sugiura¹, Lingyun Jia¹, Shunichi Sato¹, Hiroki Kondo¹, Kenji Ishikawa¹, Keigo Takeda¹, Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ.)