1:30 PM - 1:45 PM [22p-H103-3] Development of galvano scanning pulsed laser deposition and high-speed deposition of binary composition thin film by alternate deposition of two targets 〇Shingo Maruyama1, Sannodo Naoki1, Ryoma Harada1, Yuji Matsumoto1 (1.Tohoku Univ.)