Development of galvano scanning pulsed laser deposition and high-speed deposition of binary composition thin film by alternate deposition of two targets

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Tue. Mar 22, 2016 1:00 PM - 3:00 PM H103 (H)

1:30 PM - 1:45 PM

〇Shingo Maruyama¹, Sannodo Naoki¹, Ryoma Harada¹, Yuji Matsumoto¹ (1.Tohoku Univ.)

Keywords:pulsed laser deposition,Galvano mirror scanning