Minoru Sasaki

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Chairperson, etc.

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Minoru Sasaki(Toyota Tech. Inst.), Takaaki Tsunomura(Tokyo Electron Ltd.)

Sun. Mar 20, 2016 9:00 AM - 12:15 PM S423 (S4)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[20a-S423-1~9] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Minoru Sasaki(Toyota Tech. Inst.)