The 63rd JSAP Spring Meeting, 2016

Takaaki Tsunomura

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Chairperson, etc.

Sat. Mar 19, 2016 9:00 AM - 12:30 PM S423 (S4)

  • Oral presentation
  • | 13 Semiconductors
  • | 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[19a-S423-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

Minoru Sasaki(Toyota Tech. Inst.), Takaaki Tsunomura(Tokyo Electron Ltd.)