The 63rd JSAP Spring Meeting, 2016

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Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[19a-H121-1~10] 15.4 III-V-group nitride crystals

Sat. Mar 19, 2016 8:45 AM - 11:45 AM H121 (H)

Narihito Okada(Yamaguchi Univ.), Hisashi Murakami(TUAT)

9:00 AM - 9:15 AM

[19a-H121-2] AlN growth on Sapphire substrate by HVPE with RF heating system

〇yasuhiro Yamashita1, Hideto Miyake1,2, Kazumasa Hiramatsu1 (1.Mie Univ., 2.Mie Univ. Innov.)

Keywords:AlN,HVPE