[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

[19p-S224-17] Detachable Mold Fixing Methods in Ultrasonic Nanoimprinting

〇Harutaka Mekaru¹, Takayuki Yano² (1.AIST, 2.IMS)

Keywords:nanoimprint,ultrasonic vibration,mold

To investigate a detachable fixing method of a mold onto an ultrasonic horn in ultrasonic nanoimprints, a transfer efficiency of vibration energy in four different fixing methods using a double-faced tape, an adhesive agent, screw clamping, and cooling fit was compared. Although an energy loss due to a frictional heat was small in cases of fixing by the adhesive agent and screws, a deformed sine wave in case of screw clamping was measured by a laser Doppler vibrometer. It is believed that this is an effect of a screw material with a high rigidity.