1:45 PM - 2:00 PM
[19p-S224-2] Ordering analysis of randomly-aligned in-plane cylindrical domains of polystyrene-b-polydimethylsiloxane by thermal annealing method
Keywords:lithography,block copolymer,self-assembly
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication
[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication
Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)
Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)