Fabrication of array patterns of Au nanoparticles onto atomically stepped polymer sheets by thermal-nanoimprint batch transfer process

Kodai Shimada; Geng Tan; Yasuhisa Nozawa; Tatsuhiro Urakami; Koji Koyama; Masahiro Mita; Satoru Kaneko; Akifumi Matsuda; Mamoru Yoshimoto

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)

2:15 PM - 2:30 PM

△ [19p-S224-4] Fabrication of array patterns of Au nanoparticles onto atomically stepped polymer sheets by thermal-nanoimprint batch transfer process

〇Kodai Shimada¹, Geng Tan¹, Yasuhisa Nozawa¹, Tatsuhiro Urakami², Koji Koyama³, Masahiro Mita⁴, Satoru Kaneko^5,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Inst. of Tech, 2.Mitsui Chemicals, Inc., 3.Namiki Precision Jewel Co., Ltd., 4.KYODO INTERNATIONAL, INC., 5.Kanagawa Ind. Tech. Cent.)

Keywords:Thermal-nanoimprint,Au nanoparticles,atomic step pattern