The 63rd JSAP Spring Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)

3:00 PM - 3:15 PM

[19p-S224-7] Molecular orientation evaluation of liquid crystalline polymer pattern fabricated by double nanoimprint-graphoepitaxy

〇Makoto Okada1, Yusuke Taniguchi2, Yuichi Haruyama1, Hiroshi Ono3, Nobuhiro Kawatsuki2, Shinji Matsui1 (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

Keywords:Nanoimprint-graphoepitaxy,Molecular orientation