Molecular orientation observation of negative-tone and positive-tone liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy

Makoto Okada; Yusuke Taniguchi; Yuichi Haruyama; Hiroshi Ono; Nobuhiro Kawatsuki; Shinji Matsui

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[19p-S224-1~17] 7.3 Micro/Nano patterning and fabrication

Sat. Mar 19, 2016 1:30 PM - 6:00 PM S224 (S2)

Makoto Okada(Univ. of Hyogo), Atsushi Yokoo(NTT)

2:45 PM - 3:00 PM

[19p-S224-6] Molecular orientation observation of negative-tone and positive-tone liquid crystalline polymer pattern fabricated by nanoimprint-graphoepitaxy

〇Makoto Okada¹, Yusuke Taniguchi², Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (1.LASTI, Univ. of Hyogo, 2.Graduate School of Engineering, Univ. of Hyogo, 3.Nagaoka Univ. of Technology)

Keywords:Nanoimprint-graphoepitaxy,Molecular orientation