Evaluation of Stored Charge in HfO<sub>2</sub>/SiO<sub>2</sub>/Si structure

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Sun. Mar 20, 2016 9:15 AM - 11:45 AM H111 (H)

Enju Sakai(Univ. of Tokyo)

10:00 AM - 10:15 AM

〇(M1)Kazuma Noguchi¹, Hiromori Yutaro¹, Miyatake Shinji¹, Nara Yasuo¹ (1.Univ. of Hyogo)

Keywords:electret,hafnium,fixed charge