The 63rd JSAP Spring Meeting, 2016

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Oral presentation

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[20a-KD-1~5] 8.2 Plasma measurements and diagnostics

Sun. Mar 20, 2016 9:15 AM - 10:30 AM KD (KD)

Hiroshi Akatsuka(Titech)

10:15 AM - 10:30 AM

[20a-KD-5] Gas ratio dependency of GaN damage on argon-chlorine plasma

〇Yoshitsugu Banno1, Daisuke Ogawa1, Yoshitaka Nakano1, Keiji Nakamura1 (1.Chubu Univ.)

Keywords:Plasma Induced Damage,Photoluminescence,chlorine