The 63rd JSAP Spring Meeting, 2016

Presentation information

Print

Outstanding Achievement Award

Outstanding Achievement Award » [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

[20a-KD-6~6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

Sun. Mar 20, 2016 10:45 AM - 11:30 AM KD (KD)

Masaharu Shiratani(Kyushu Univ.)

10:45 AM - 11:30 AM

[20a-KD-6] [Outstanding Achievement Award] Pioneering research and development of semiconductor dry etching technologies and the industrialization

〇Yasuhiro Horiike1 (1.Univ. of Tsukuba)

Keywords:semiconductor dry etching technologies

Title: Pioneering research and development of semiconductor dry etching technologies and the industrialization