[20a-P1-1~10] 6.1 Ferroelectric thin films

[20a-P1-4] Physical Properties of Ink-Jet Liquid Solutions for Ferroelectric Thin Film Fabrication

Yuta Matsuoka¹, 〇Masaki Yamaguchi^1,2, Yoichiro Masuda³ (1.Shibaura Inst. of Tech., 2.RCGI, Shibaura Inst. of Tech., 3.Hachinohe Inst. of Tech.)

Keywords:Ink-Jet Printing,Droplet

Maskless process is very important technology by the applicability of the ferroelectric thin films. We reported on ink-jet pattern formation using alcoholic solution, and stabilized liquid solutions. In this study, we reported that temperature dependency of the solution viscosity.