[20p-P14-1~23] 13.10 Compound solar cells

[20p-P14-5] Quantification of sputtering damage during deposition on a substrate using electrochemical impedance spectroscopy for thin film solar cells

〇(M1)Hiroshi Nakai¹, Hidenori Sakakura¹, Daisuke Kawade¹, Huseyin Sari², Masayuki Itagaki¹, Mutsumi Sugiyama¹ (1.Faculty of Science & Technology / RIST, Tokyo University of Science, 2.Ankara University)

Keywords:sputter,NiO,electrochemical impedance spectroscopy