[20p-S221-1~17] 13.3 Insulator technology

[20p-S221-11] The effect of Ion drift in SrTiO₃ by Liquid-Phase Deposition method

〇(M1C)Shunsaku Kunimitsu¹, Motoki Inano¹, Nobuo Haneji¹ (1.YNU)

Keywords:Liquid Phase Deposition,dielectric thin film,ion drift

By the growth in recent years of the information society, lighter weight, higher speed has been required in electronic devices. In this laboratory, we have done research on applications of MIM (Metal Insulator Metal) capacitor and FeRAM using ferroelectric materials such as (Ba, Sr) TiO₃ (BST) and Bi₄Ti₃O₁₂ (BIT) by liquid phase deposition method. In this study, we found the effect of the ion drift in SrTiO₃ which is the basic constituent of BST deposited by LPD method, it is to report this.