The 63rd JSAP Spring Meeting, 2016

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Oral presentation

3 Optics and Photonics » 3.15 Silicon photonics

[20p-S621-1~13] 3.15 Silicon photonics

Sun. Mar 20, 2016 1:45 PM - 5:30 PM S621 (S6)

Katsuya Oda(Hitachi R&D Group), Nobuaki Hatori(PETRA), Junichi Fujikata(PETRA)

3:30 PM - 3:45 PM

[20p-S621-7] Fabrication of Ge/SiGe Heterojunction Avalanche Photodiodes

〇Yuji Miyasaka1, Tatsurou Hiraki2, Kota Okazaki2, Tai Tsuchizawa2, Tsuyoshi Yamamoto2, Kazumi Wada1, Yasuhiko Ishikawa1 (1.Univ. Tokyo, 2.NTT Device Technology Labs.)

Keywords:Silicon photonics,photodiode