The 63rd JSAP Spring Meeting, 2016

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Symposium » Gas Flow Analysis in Vacuum and Low-Pressure Processing

[20p-W621-1~7] Gas Flow Analysis in Vacuum and Low-Pressure Processing

Sun. Mar 20, 2016 2:00 PM - 5:30 PM W621 (W6)

Ken Nakamura(AIST), Yoshihiko Moriyama(Toshiba Corporation)

2:15 PM - 2:45 PM

[20p-W621-2] Basic Theory and Numerical Methods of Molecular Flow

〇Namio Matuda1 (1.Tokyo Denki Univ.)

Keywords:molecular flow,transmission probability,pressure distribution