2:15 PM - 2:45 PM
[20p-W621-2] Basic Theory and Numerical Methods of Molecular Flow
Keywords:molecular flow,transmission probability,pressure distribution
Presentation information
Symposium
Symposium » Gas Flow Analysis in Vacuum and Low-Pressure Processing
[20p-W621-1~7] Gas Flow Analysis in Vacuum and Low-Pressure Processing
Sun. Mar 20, 2016 2:00 PM - 5:30 PM W621 (W6)
Ken Nakamura(AIST), Yoshihiko Moriyama(Toshiba Corporation)